Spin-Coater/ Hotplate CEE-200-CB System

CEE-200-CB (Brewer Science Inc.) is a benchtop spincoater and a hotplate system. The primary use of this equipment is for spin coating of and baking photoresist for the fabrication of thin film patterns. It can also be used for coating other materials by ultrafast spinning. The thickness of the coatings depends on the viscosity of the liquid and angular speed of the rotating plate which is programmable in a wide range.

Specifications and capabilities of CEE-200-CB system

• All stainless steel construction.
• Vacuum suction in the sample holder is used to hold the spinning wafers.
• Spinning cycle is programmable.
• The spin speed can be controlled in the range from 0 to 12000 RPM.
• Spin speed repeatability and resolution < 0.2RPM.
• Hotplate heated up to 400 deg C.
• Temperature resolution of 0.1 deg.
• 0.3% uniformity across the working surface.
• The system is located in the AMRI cleanroom facility.

Sample Data