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Nanodevice Processing Laboratory

Clean Room Facility (“Class 100”)

This facility was developed to provide research support for AMRI and collaborating institutions with the cleanroom facilities and technology to do competitive research in the field of nanofabrication.  The evaluation of the purity of the air is based on number of dust particles in a unit volume. Due to this design the air is filtered several times before leaving the clean room and the number of particles present in the unit volume dropped to below 100, which elevates the rank of the clean room to “Class 100”.

Specialized Equipment

  • Four vertical flow benches
  • Particle monitoring system
  • Spin-coater/hot plate (Coat-bake) system, Model CEE 200CB
  • Mask aligner/UV exposure station
  • Milling system, Orion-8-IM.