Thin Films

AMRI has extensive thin films and masking capabilities. For thin films production, we have two state-of-the-art systems.

  • AJAPhysical deposition system ORION-8

    Consists of 3 ultra-high vacuum chambers which accommodate magnetron sputtering, electron beam evaporation and in-vacuum analysis tools. The system is used for a deposition of thin films of various materials with the thickness of single nm to micrometers.

  • APXMicrolayer 400

    Is a combination physical deposition system with 6 magnetron sputtering guns and dual electron beam evaporator with 10 pockets for materials in an ultra-high vacuum chamber. This system allow deposition of a large variety of materials in the form of thin films with the thickness from single nanometers to a few micrometers.