Spin-Coater/ Hotplate CEE-200-CB System

Spin CoaterCEE-200-CB System

CEE-200-CB (Brewer Science Inc.) is a benchtop spincoater and a hotplate system. The primary use of this equipment is for spin coating of and baking photoresist for the fabrication of thin film patterns. It can also be used for coating other materials by ultrafast spinning. The thickness of the coatings depends on the viscosity of the liquid and angular speed of the rotating plate which is programmable in a wide range.

User Rates

Rates will be based on an hourly or per sample basis and will be decided after consultation with the customer.

Hourly rates for instrument use

  • Assisted Use: $15/hr.
  • Training including cleanroom training: $50/hr.
  • Self-Use: $10/hr.

Consumables charged at cost.

Contact Us

Dr. Leszek Malkinski

Specifications and capabilities of CEE-200-CB system

  • All stainless steel construction.
  • Vacuum suction in the sample holder is used to hold the spinning wafers.
  • Spinning cycle is programmable.
  • The spin speed can be controlled in the range from 0 to 12000 RPM.
  • Spin speed repeatability and resolution < 0.2RPM.
  • Hotplate heated up to 400 deg C.
  • Temperature resolution of 0.1 deg.
  • 0.3% uniformity across the working surface.
  • The system is located in the AMRI cleanroom facility.

Sample Data

Sample data