Field Emission Scanning Electron Microscope


Field Emission Scanning Electron Microscope (FESEM) has great capabilities to observe, measure, analyze, and manipulate nanoscale objects. Our institute has ultra-high resolution Carl Zeiss FESEM (LEO 1530 VP) equipped with energy dispersive X-ray spectrometer (EDS) detector. Our FESEM is also integrated with JC Nabity nanolithography system and perform e-beam nano-patterning. With the unique combination of GEMINI ultra-high performance electron optics and variable pressure technology, the FESEM delivers a range of applications for different materials, such as , such as semiconductive, geological, biological, and composite materials, at nanoscale.

User Rates

Rates will be based on an hourly or per sample basis and will be decided after consultation with the customer.

  • Internal rate: $40/hr.
  • External rate: $70/hr.
  • Training: $50/hr.

Consumables charged at cost.

Contact Us

Dr. Weilie Zhou

Specifications and capabilities of FESEM(LEO 1530 VP)

  • Schottky thermal emitter with ultra-high resolution (1 nm at 20 kV, and 2.5 nm at 1 kV)
  • Annular In-Lens SE detector and lateral SE detector with patented GEMIN lens
  • Elements analysis by OXFORD EDS (Point, line, and area EDS analysis as well EDS mapping)
  • x/y/z axes motorized stage allowing up to 45° of tilt
  • JC Nabity e-beam nano-patterning system
  • Manipulation nano-scale objects and in-situ measurement by micro probes

Sample Data

Sample data